FLS 106 IC
4-Axis Positioning System
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FLS 106 with ICR microprobe
Short description
The FLS 106 4-axis positioning system is used to move near field probes in four axises and to rotate the near field probes above a DUT.
Technical parameters
| Supply voltage | 110 V / 230 V |
| Interface | USB |
| Axes x, y, z; α | |
| Max. traverse range | (400 x 600 x 120) mm; α-Rotation ±180° |
| Min. step size | (20 x 20 x 20) µm; α-Rotation 1° |
| Positioning speed | (20 x 25 x 10) mm/s; α-Rotation 90°/s |
| Weight | 75 kg |
| Sizes (L x W x H) | (1030 x 775 x 990) mm |